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Upgraded ag heatpulse 4100 with ALLWIN21 corp software
For Sale: Upgraded ag heatpulse 4100 with ALLWIN21 corp software
Subject Upgraded ag heatpulse 4100 with ALLWIN21 corp software
Ad is submitted by poster:
Advanced upgraded AG4100 System by Allwin21 Corp Software
l Software calibration and easy to be done.
l More functions and I/O hardware “exposed†for easier maintenance and trouble shooting.
l It is easy to edit recipe with GUI and graph display.
l Save all process data on the computer hard disk.
l A/D and D/A precision is 14 to 16 bits.
l Detect in process and with color curve displayed on the screen.
l Robot teach is on the GUI and easy to do the procedure with new concept teaching method.
l Lamp damage detect in process.
l Software watch dog to eliminate machine damage duo to the computer locks up or freeze.
l Sensor status detect function.
l High-intensity visible radiation heats wafers for short periods. Fast heating and cooling rates unobtainable in conventional technologies.
l Consistent wafer-to-wafer process cycle repeatability.
l Elimination of external contamination.
1.1 Small footprint and energy efficiency.Wafer Size 4â€, 5†and 6†without change any hardware and software.
1.2 AG Heatpulse 4100 system main frame which is painted like new.
2.2 Robot control ability. (Equip Tech. robot with one arm)
1.3 Gold coated aluminum chamber with water cooling
1.4 Radiation heating lamp module
1.7 Precise Temperature/Time control
1.8 Multiple cycle processing capability
1.9 Steady Temp Range: 600°C to 1250°C for pyrometer sensor, 100°C to 600°C for Thermocouple.
1.10 Steady state process time 0 to 30000 sec programmable
1.11 Temp Ramp-up Speed: 10°C to 80°C for wafer. Programmable
1.12 Ramp down speed 10°C - 80°C for wafer, programmable.
1.13 Robot wafer cycling: > 80 Wafers/Hr.
1.14 New hardware includes: three interface cards with cable, new timer counter with watch dog, Pentium Computer with 15†LCD Monitor, standard keyboard and mouse.
Physical Dimensions, Utility Requirement:
2.1 102cm (40†Width) x 107 cm (42†Deep) x 208 cm (82†Height) without PC dimension.
2.3 200, 208, 220 VAC; 50 or 60 Hz, 70A maximum, 3 phase plus ground
2.4 380, 415 VAC; 50 Hz; 70A; 3-phase plus ground plus neutral with transformer to 208V.
2.5 Pre-filtered with conventional particulate filter (no DI water)
2.6 Water Inlet pressure: 60psi (4.2kg/cm2) maximum
2.7 Water Inlet temperature 35°C maximum, 3°C dew point.
2.8 Water flow: 2 gpm (7.5 lpm) minimum.
2.9 Pressure differential: 35 to 50 psi (2.5 to 3.5 kg/cm2)
2.10 Process Gases: Nitrogen, Argon, forming gas, ammonia, hydrogen chloride, and oxygen.
2.11 Process gas flow: 10slpm for nitrogen, argon, forming gas, and oxygen maximum; 5 slpm for ammonia; and 200sccm for hydrogen chloride maximum.
2.12 Compressed cooling gas inlet pressure: 20 pslg (1.4kg/cm2)
2.13 Cooling gas: nitrogen or oil-and wafer-free air, 10 scfm (283 slpm) minimum
2.14 Exhaust 50 scfm (1416 slpm)
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Posted By: Florence Mcmillan
Contact: F.Mcmillan@repair--parts.com (Florence Mcmillan) (this is a temporary forwarding address).
